Match Pro Impedance Matching Networks
Ultra-Fast Tuning and Fine Tune Resolution Deliver Repeatable Process Results
Performance
All Match Pro impedence matching networks are engineered with XP Comdel's unique PROTRAK, a high-speed tuning algorithm that gradually slows the system as it approaches the tuning point, allowing a precise match even in high "Q" loads. This proportional control circuitry illustrates the critical difference between XP Comdel's Match Pro and other matching networks. The Match Pro adjusts input impedance to 50 Ohms quickly, accurately and dependably—in response to the changes in load characteristics during your process. The Match Pro operates over a power range from 50 to 50,000 Watts.
Features
Automatic and manual modes with local and remote
manual control of tuning capacitors
Ability to pre-position capacitors to optimal plasma ignition point prior to turn on, resulting in quick and reliable tuning
Capacitor position outputs to show where the match occurs from process to process
High power, H-bridge, Mosfet motor drive circuitry is conservatively rated for improved reliability
Specifications
- XP Comdel engineers will map the impedance of your active chamber to determine the custom design and optimal tuning elements for your process requirements.
- Frequency range: Configured to operate from 2 to 80 MHz
- Line input voltage/power: 115/208/230VAC; single phase; 50/60 Hz (other input voltages may be special ordered) 50 Watts maximum power required while tuning
- VSWR: Typically less than 1.5 to 1 in a 50-Ohm system
- Cooling: Forced air or water cooling is employed as dictated by network operating "Q" and power level. Operating ambient temperature range is -10 to +35° C
- Mounting: The Match Pro unit must be mounted close to the chamber for optimum performance. Custom mounting configurations are accommodated.
Options
To optimize the tuning range of the Match Pro system, XP Comdel engineers map the impedance of your active chamber. This mapping allows optimal tuning elements to be chosen for your process requirements. Customization assures that you receive the voltage and current handling capabilities, tuning range, tuning time and physical size required.